| 
 | 21 |  | 2024 | 30,00 mio. € |
|  | 35 |  | 2022 | 10,00 mio. € |
| 
 | 32 |  | 2023 | 10,00 mio. € |
|  | 29 |  | 2022 | 8,00 mio. € |
|  | 23 |  | 2021 | 8,00 mio. € |
| 
 | 27 |  | 2021 | 7,50 mio. € |
| 
 | 20 |  | 2025 | 7,00 mio. € |
| 
 | 20 |  | 2021 | 6,50 mio. € |
|  | 28 |  | 2022 | 4,00 mio. € |
|  | 22 |  | 2023 | 3,00 mio. € |
| 
 | 19 |  | 2025 | 3,00 mio. € |
|  | 31 |  | 2022 | 2,00 mio. € |
|  | 28 |  | 2022 | 2,00 mio. € |
|  | 18 |  | 2021 | 2,00 mio. € |
| 
 | 21 |  | 2022 | 2,00 mio. € |
| 
 | 22 |  | 2021 | 2,00 mio. € |
| 
 | 24 |  | 2021 | 1,80 mio. € |
| 
 | 26 |  | 2023 | 1,60 mio. € |
|  | 25 |  | 2021 | 1,50 mio. € |
|  | 23 |  | 2021 | 1,50 mio. € |
| 
 | 23 |  | 2022 | 1,50 mio. € |
| 
 | 22 |  | 2024 | 1,50 mio. € |
| 
 | 23 |  | 2022 | 1,30 mio. € |
|  | 19 |  | 2025 | 1,00 mio. € |
|  | 32 |  | 2022 | 1,00 mio. € |
| 
 | 24 |  | 2022 | 900 K € |
|  | 23 |  | 2024 | 800 K € |
| 
 | 30 |  | 2021 | 800 K € |
|  | 24 |  | 2022 | 800 K € |
|  | 25 |  | 2023 | 800 K € |
|  | 27 |  | 2022 | 700 K € |
| 
 | 25 |  | 2021 | 700 K € |
|  | 25 |  | 2023 | 700 K € |
| 
 | 25 |  | 2022 | 600 K € |
|  | 28 |  | 2023 | 600 K € |
| 
 | 30 |  | 2022 | 600 K € |
|  | 29 |  | 2022 | 500 K € |
| 
 | 32 |  | 2022 | 500 K € |
|  | 24 |  | 2021 | 400 K € |
|  | 32 |  | - | 400 K € |
|  | 22 |  | 2021 | 400 K € |
| 
 | 22 |  | 2024 | 400 K € |
|  | 24 |  | 2023 | 350 K € |
|  | 22 |  | 2021 | 325 K € |
| 
 | 21 |  | 2023 | 300 K € |
| 
 | 22 |  | 2022 | 300 K € |
| 
 | 29 |  | 2022 | 250 K € |
| 
 | 24 |  | 2023 | 250 K € |
| 
 | 31 |  | 2021 | 200 K € |
|  | 20 |  | 2021 | 200 K € |
|  | 28 |  | 2021 | 200 K € |
|  | 23 |  | 2022 | 200 K € |
|  | 21 |  | 2021 | 200 K € |
| 
 | 28 |  | 2021 | 150 K € |
|  | 31 |  | 2021 | 150 K € |
| 
 | 24 |  | 2022 | 150 K € |
| 
 | 24 |  | 2022 | 150 K € |
|  | 21 |  | 2021 | 125 K € |
| 
 | 19 |  | 2023 | 100 K € |
|  | 26 |  | 2021 | 100 K € |
|  | 31 |  | 2021 | 100 K € |
| 
 | 21 |  | 2022 | 100 K € |
|  | 21 |  | 2021 | 100 K € |
|  | 21 |  | 2021 | 100 K € |
|  | 23 |  | 2021 | 100 K € |
|  | 23 |  | - | 100 K € |
|  | 28 |  | - | 100 K € |
|  | 21 |  | 2022 | 100 K € |
|  | 27 |  | 2022 | 100 K € |
|  | 23 |  | 2023 | 100 K € |
|  | 21 |  | 2021 | 100 K € |
|  | 22 |  | 2021 | 100 K € |
|  | 24 |  | 2021 | 100 K € |
|  | 23 |  | - | 75 K € |
|  | 19 |  | 2023 | 50 K € |
|  | 28 |  | 2022 | 50 K € |
|  | 19 |  | 2022 | 50 K € |
|  | 18 |  | 2022 | 50 K € |
|  | 19 |  | 2021 | 50 K € |
| 
 | 22 |  | 2020 | - |
| 
 | 19 |  | - | - |
|  | 18 |  | - | - |
|  | 20 |  | 2022 | - |
|  | 18 |  | 2023 | - |
|  | 23 |  | 2021 | - |
| 
 | 18 |  | - | - |
|  | 19 |  | 2023 | - |
|  | 18 |  | 2023 | - |
|  | 18 |  | 2021 | - |
|  | 21 |  | 2022 | - |
|  | 19 |  | 2022 | - |
|  | 20 |  | - | - |
| 
 | 18 |  | - | - |
|  | 25 |  | - | - |
| 
 | 20 |  | 2023 | - |
| 
 | 22 |  | 2023 | - |
|  | 23 |  | 2022 | - |